Microelectromechanical Systems MEMS Research Lab

Microelectromechanical Systems MEMS Research Lab

  • Focused in the research of MEMS electrostatic sensors and actuators, capacitive micro machined ultrasonic transducers, planar and non-planar beamforming acoustical arrays, FMCW short and long range radars, ultra-wideband radars, sonoluminescence based MEMS transducer, MEMS multi-spectral multi-functional transducers, 3-D packaging and integration and MEMS micro-power generator 

  • Possesses expertise in Bio-medical ultrasound and NDE, UWB radar medical diagnostics, Automotive collision avoidance, Surveillance & security, Biometric identification, Cardiac pacemakers, 3-D Microsystems

  • Is dedicated to developing microsystems to provide improved health care, automotive safety, and security

Has capabilities in: 

  • E-beam evaporation
  • Reactive e-beam evaporation
  • Thermal evaporation
  • DC/RF/Reactive sputtering 
  • Automated mask alignment system 
  • Wafer bonding
  • Vacuum load lock ICP RIE
  • Profilometer
  • Nikon microscope
  • Wet benches
  • Ball, wedge, and ribbon bonder
  • IntelliSuite
  • ADS
  • Labview
  • Verasonics Vantage 128 system

To get involved with the Microelectromechanical Systems MEMS Research Lab

Contact: Dr. Sazzadur Chowdury
Department of Electrical and Computer Engineering 
519-253-3000, Ext. 4794