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Focused in the research of MEMS electrostatic sensors and actuators, capacitive micro machined ultrasonic transducers, planar and non-planar beamforming acoustical arrays, FMCW short and long range radars, ultra-wideband radars, sonoluminescence based MEMS transducer, MEMS multi-spectral multi-functional transducers, 3-D packaging and integration and MEMS micro-power generator
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Possesses expertise in Bio-medical ultrasound and NDE, UWB radar medical diagnostics, Automotive collision avoidance, Surveillance & security, Biometric identification, Cardiac pacemakers, 3-D Microsystems
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Is dedicated to developing microsystems to provide improved health care, automotive safety, and security
Has capabilities in:
- E-beam evaporation
- Reactive e-beam evaporation
- Thermal evaporation
- DC/RF/Reactive sputtering
- Automated mask alignment system
- Wafer bonding
- Vacuum load lock ICP RIE
- Profilometer
- Nikon microscope
- Wet benches
- Ball, wedge, and ribbon bonder
- IntelliSuite
- ADS
- Labview
- Verasonics Vantage 128 system
To get involved with the Microelectromechanical Systems MEMS Research Lab
Contact: Dr. Sazzadur Chowdury
Department of Electrical and Computer Engineering
519-253-3000, Ext. 4794
sazzadur@uwindsor