Mechanical Engineering
1st PhD Graduate Seminar
CANDIDATE: Jingshuai (Frank) Guo
DEGREE SOUGHT: PhD
DATE: 10/24/2025
TIME: 11:30am
PLACE: Room 1101 CEI
TITLE: Frequency Split Analysis Of MEMS Vibrating Ring Resonator With Petal-Shaped Spring Support For Mode Match Gyroscope
Abstract
Microelectromechanical systems (MEMS) based resonators acting as mode match gyroscopes need minimum frequency split between degenerate resonator modes. We recently developed a novel MEMS ring resonator supported by rose-petal-shaped inner springs at the University of Windsor. In this paper, we present eigenfrequency analysis using finite element simulation to study the effects of the geometric on the frequency split of a single-ring resonator. The results showed, that there is an optimum radius for the anchor, below that, the frequency split is negligible; by increasing the ring radius, the frequency split reduces; for changing the ring width, the frequency splits at first reduced by increasing the width till near zero and increase significantly after an optimum value reached, this behaviour can also applied to the change in the spokes center angles and the spoke width. The detailed modelling results presented in this paper can further enhance the development of MEMS inertial sensors.